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Title:
SUBSTRATE TRANSPORTING DEVICE, SUBSTRATE PROCESSING DEVICE, AND PLANE INDICATING DEVICE
Document Type and Number:
Japanese Patent JP2006256768
Kind Code:
A
Abstract:

To suppress the cost for providing a substrate transporting device, processing device, etc. by using an existing facility unchangedly without requiring introducing a facility proprietary for inclined transportation, i.e. without necessity for replacing the existing facility with a new one.

The substrate transporting device 13 is equipped with a mounting plate 17 extending in the transporting direction of a mother glass B, a plurality of holders 18 installed in line in the longitudinal direction with respect to the mounting plate 17, and a shaft 20 furnished with rollers 21 supported rotatbly by the respective holders 18 through bearings 19 and able to transport the mother glass B. It is arranged for a spacer 25 to be interposed between the mounting plate 17 and each holder 18, and the mother glass B is made transportable in the inclined attitude by adjusting the mounting height of each holder 18 with the spacer 25.


Inventors:
SUKAI JUNICHI
Application Number:
JP2005075585A
Publication Date:
September 28, 2006
Filing Date:
March 16, 2005
Export Citation:
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Assignee:
SHARP KK
International Classes:
B65G49/06; B65G13/12; G02F1/13; H01L21/677
Attorney, Agent or Firm:
Arisa Ushiro
▲高▼木 芳之
Jiro Murakami
Keiko Mizusawa