Title:
SUPPORT FOR ROLLER MECHANISM, ROLLER MECHANISM, AND ETCHING APPARATUS
Document Type and Number:
Japanese Patent JP2020109854
Kind Code:
A
Abstract:
To provide a support for a roller mechanism capable of independently determining bearing positions of two rollers, a roller mechanism using the support, and an etching apparatus using the same.SOLUTION: A support 11 for a roller mechanism includes: a lower-tier groove 11a1 formed in a shape including a first semicircle 11a11 and a first rectangle 11a12; and an upper-tier groove 11a2 formed in a shape including a second semicircle 11a21 and a second rectangle 11a22. By inserting a lower-tier roller 12 and an upper-tier roller 13 from an opening of the groove, receiving the lower-tier roller 12 at the lower-tier groove through the upper-tier groove, and receiving the upper-tier roller 13 at the upper-tier groove, bearing positions of the two rollers can be independently determined, and the roller mechanism 10 can be configured. The roller mechanism 10 can be used to configure an etching apparatus 1.SELECTED DRAWING: Figure 1
More Like This:
Inventors:
SATO HIDEKI
Application Number:
JP2020037502A
Publication Date:
July 16, 2020
Filing Date:
March 05, 2020
Export Citation:
Assignee:
FUJI KIKO KK
International Classes:
H01L21/306; B65G13/00
Attorney, Agent or Firm:
Hiroshi Kaneko