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Title:
SURFACE SHAPE MEASURING DEVICE, SURFACE SHAPE MEASURING METHOD, AND MICROSCOPIC OBJECTIVE OPTICAL SYSTEM
Document Type and Number:
Japanese Patent JP2008292218
Kind Code:
A
Abstract:

To provide a surface shape measuring device capable of measuring with high accuracy the surface shape of an inspection surface, having a spherical shape in accordance with an easily designed/manufactured and simple constitution.

This surface shape measuring device for measuring the surface shape of the inspection surface 20a having the spherical shape is equipped with a mirror 3 for allowing light of reflected spherical waves to enter the inspection surface directly, and measuring parts 1, 2 for measuring the surface shape of the inspection surface, based on the light reflected by the inspection surface. The measuring parts have an interferometer 1 for measuring the surface shape of the inspection surface, based on the interference between reference light reflected by a reference surface 2a, arranged on the front side of the mirror and measuring light reflected by the inspection surface. The mirror has a paraboloid mirror for converting entering parallel light into light of the spherical waves, and condensing the light to a curvature center 20b of the surface to be inspected.


Inventors:
TAKIGAWA YUICHI
Application Number:
JP2007136174A
Publication Date:
December 04, 2008
Filing Date:
May 23, 2007
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G01B11/24; G02B17/06; G02B17/08
Domestic Patent References:
JP2003149411A2003-05-21
JPH1054805A1998-02-24
JPH08247953A1996-09-27
JPH08285560A1996-11-01
JPH07151736A1995-06-16
JPH102714A1998-01-06
Attorney, Agent or Firm:
Takao Yamaguchi