Title:
SURFACE STRUCTURE OF INTEGRATED CIRCUIT
Document Type and Number:
Japanese Patent JPS5833844
Kind Code:
A
Abstract:
PURPOSE:To prevent the influence of an external noise electric field to a semiconductor integrated circuit by covering the surface of the integrated circuit with a metallic film, thereby incorporating a shielding effect in the surface of the integrated circuit. CONSTITUTION:A metallic film 4 made of aluminum or the like is deposited on a protective film 3 of a circuit, and the potential is connected through a pad to a power source. A protective film 5 made of oxidized silicon film or the like is further grown on the film 4. Since shielding effect can be incorporated in the surface with this structure, the influence of external noise electric field to the circuit can be prevented, thereby obviating the erroneous operation of the internal circuit.
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Inventors:
NISHIMURA MUTSUHIRO
Application Number:
JP13234281A
Publication Date:
February 28, 1983
Filing Date:
August 24, 1981
Export Citation:
Assignee:
SUWA SEIKOSHA KK
International Classes:
H01L21/314; (IPC1-7): H01L21/314
Attorney, Agent or Firm:
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