浮上搬送装置 - Ihi Co., Ltd.

Title:

浮上搬送装置

Document Type and Number:

Japanese Patent JP5471604

Kind Code:

B2

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Inventors:

Tomoyuki Kuzumi

Application Number:

JP2010046543A

Publication Date:

April 16, 2014

Filing Date:

March 03, 2010

Export Citation:

Assignee:

Ihi Co., Ltd.

International Classes:

B65G51/03; B65G13/10; B65G39/12; B65G47/54; B65G49/06; H01L21/677

Domestic Patent References:

Attorney, Agent or Firm:

Hidekazu Miyoshi
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu

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