Title:
【発明の名称】テープ伸張収縮装置およびテープの伸張収縮方法
Document Type and Number:
Japanese Patent JP2810810
Kind Code:
B2
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Inventors:
Kenji Kurato
Application Number:
JP18097291A
Publication Date:
October 15, 1998
Filing Date:
July 22, 1991
Export Citation:
Assignee:
ROHM Co., Ltd.
International Classes:
H01L21/67; H01L21/301; H01L21/68; (IPC1-7): H01L21/301; H01L21/68
Domestic Patent References:
| JP5839029A | ||||
| JP61121453A | ||||
| JP62119007A | ||||
| JP49114345A | ||||
| JP52135666A | ||||
| JP611037A |
Attorney, Agent or Firm:
Furuya Eiko