PURPOSE: To obtain the accurate temperature and humidity sensor wherein both sensors for temperature and humidity are formed as a unitary body by arranging both the humidity sensor and the temperature sensor at a same Position.
CONSTITUTION: In a humidity sensor, a moisture sensitive film 1 is applied on a metal electrode 2 which is to become the first electrode, and a counter electrode 3 which is to become the second electrode has the linear shape. The counter electrode 3 is wound around the metal electrode 2 so that the electrode 3 comes into contact with the moisture sensitive film 1. The counter electrode 3 is formed by using a linear temperature measuring resistor material. At this time, the metal electrode 2 is made of stainless steel, and the moisture sensitive film 1 is made of a phosphoric acid salt. Meanwhile, the temperature measuring resistor material is formed as a noble metal wire or a noble-metal plated wire. This temperature and humidity sensor 8 is used, and the humidity is measured based on the change in resistance value or the change in capacitance value across both electrodes of the temperature and humidity sensor. The temperature can be measured based on the change in resistance value across the counter electrode 3.
ISHIKURA KAZUHIRO