To detect a plurality of defect types, in a short time without degrading detection performance.

A plurality of drive signals having a driving waveform, corresponding to a defect type of a TFT array are prepared, and a plurality of defect types are detected during inspection of one substrate, by altering a drive signal applied according to a scanning condition in the inspection of the substrate. A TFT array inspection device performs array inspection, by having the TFT array irradiated with an electron beam in a scanning manner and detecting a secondary electron emitted from the array by irradiated electron beam. The TFT array inspection device includes a storage means for storing a plurality driving waveform data; a TFT driving means for generating a drive signal for driving the TFT array using the driving waveform data read out from the storage means; a drive signal selecting means for selecting a drive signal to be applied to the TFT array from a plurality of the drive signals generated by the TFT driving means; and a control means for controlling scanning of the electron beam and driving of the TFT array. The drive signal selecting means selects the generated drive signal.