Title:
THERMAL TREATMENT APPARATUS AND THERMAL TREATMENT METHOD
Document Type and Number:
Japanese Patent JP2016125784
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a thermal treatment apparatus and a thermal treatment method capable of measuring an entire temperature of a plate under a high reliability.SOLUTION: A plate part 20 is constituted by an upper plate 21, a lower plate 22 and a heat treatment part 23. A plurality of temperature sensor elements 51 having characteristic values varying in response to a temperature are arranged at a plurality of positions at the lower plate 22, respectively.The upper plate 21 having a base plate W mounted thereon is heated or cooled by a thermal treatment part 23. Each of the characteristic values of the plurality of temperature sensor elements 51 varies in response to temperatures at the plurality of positions of the plate part 20. A representing temperature defined by temperatures at a plurality of positions at the plate part 20 is acquired on the basis of the characteristic values of the plurality of temperature sensor elements 51.SELECTED DRAWING: Figure 1
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Inventors:
NISHI KOJI
GOTO SHIGEHIRO
KADOMA TORU
GOTO SHIGEHIRO
KADOMA TORU
Application Number:
JP2015001347A
Publication Date:
July 11, 2016
Filing Date:
January 07, 2015
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
F27D19/00; F27B5/18; F27D11/02; G01K1/14; H05B3/00
Attorney, Agent or Firm:
Yoshito Fukushima
Sawamura Hideyuki
Sawamura Hideyuki