Title:
熱処理装置及び熱処理方法
Document Type and Number:
Japanese Patent JP4695063
Kind Code:
B2
Inventors:
Ken Nakao
Kenichi Yamaga
Takanori Saito
Kenichi Yamaga
Takanori Saito
Application Number:
JP2006349691A
Publication Date:
June 08, 2011
Filing Date:
December 26, 2006
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F27B17/00; F27D7/06; F27D11/02; H01J9/22
Domestic Patent References:
| JP57035282A | ||||
| JP2000146446A | ||||
| JP48023607A | ||||
| JP4206227A | ||||
| JP4206232A | ||||
| JP4074298U | ||||
| JP9055164A | ||||
| JP55102150A |
Attorney, Agent or Firm:
Nobuo Kinutani
Noriyuki Kanasaka
Noriyuki Kanasaka