Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
THIN-FILM TRANSISTOR, LIQUID CRYSTAL DISPLAY DEVICE USING THE THIN-FILM TRANSISTOR AND ELECTROLUMINESCENCE DISPLAY DEVICE
Document Type and Number:
Japanese Patent JP2002190604
Kind Code:
A
Abstract:

To provide a thin-film transistor of high reliability where factors of instability that irregularity in threshold voltage, fluctuation in the threshold voltage, in voltage-applying test at a high temperatures, etc., are eliminated.

This thin-film transistor 10 is provided with a semiconductor thin film 13, which has a channel region 13a, and a source region 13b and a drain region 13c, which are formed on both sides of the channel region 13a, a gate insulating film 14 formed on the semiconductor thin film 13, and a gate electrode 15 which is formed on a position, corresponding to the channel region 13a on the gate insulating film 14. The respective concentrations of impurity elements existing in an interface between the semiconductor thin film 13 and the gate insulating film 14 are at most 3×1011 atoms/cm2.


More Like This:
Inventors:
IKUTA SHIGEO
KAWAKITA TETSUO
IDO MASUMI
Application Number:
JP2001000288563
Publication Date:
July 05, 2002
Filing Date:
September 21, 2001
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G02F1/1368; G09F9/30; G09F9/35; H01L21/20; H01L21/336; H01L27/32; H01L29/786; (IPC1-7): H01L29/786; G02F1/1368; G09F9/30; G09F9/35; H01L21/20; H01L21/336
Attorney, Agent or Firm:
大前 要