Title:
TRANSFER APPARATUS, CLEANING APPARATUS AND DEVELOPMENT APPARATUS
Document Type and Number:
Japanese Patent JP3919464
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a transfer apparatus which can protect raising dust and carry out easily such as maintenance.
SOLUTION: The transfer apparatus is constructed so that a first gear 52 and a second gear 55 are located in a clearance and a drive force of a motor 44 is transmitted to a transfer roller 43 by attraction of permanent magnets 48, 49 deposited on the gears 52, 55 respectively, thereby, the raising dust can be protected without the gears contacted each other. Moreover, the transfer apparatus is constructed so that a shaft component 53 can be easily removed together with a bearing 45 and the first gear 52, etc., by locating a cutout portion 41a on a holding component 41, thereby, maintenance of, e.g. the bearing 45, the first gear 52, or mechanisms under the apparatus can be easily made.
More Like This:
| JP5263604 | Substrate foreign matter removal device |
| JP2001219130 | CLEANING DEVICE FOR THIN WORK |
| JP5228989 | Drainer for steel plate |
Inventors:
Kiyohisa Tateyama
Application Number:
JP2001130740A
Publication Date:
May 23, 2007
Filing Date:
April 27, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B08B1/02; G03F7/30; B08B3/02; H01L21/677; B08B13/00; B65G13/06; B65G49/06; H01L21/027; H01L21/304; H01L21/68; (IPC1-7): H01L21/68; B08B1/02; B08B3/02; B08B13/00; B65G13/06; B65G49/06; G03F7/30; H01L21/027; H01L21/304
Domestic Patent References:
| JP10209096A | ||||
| JP11280836A | ||||
| JP2000142935A | ||||
| JP2000062925A | ||||
| JP2116738U |
Attorney, Agent or Firm:
Junichi Omori