PURPOSE: To well transfer the rugged patterns of a stamper to a UV curing resin layer by maintaining the stamper in a constant temp. state and bringing the stamper into pressurized contact with a disk substrate coated with a UV curing resin.
CONSTITUTION: The disk substrate 7 coated with the UV curing resin is disposed on the stamper 10 of a transfer device 11 in such a manner that the UV curing resin comes into tight contact with the stamper 10. The stamper 10 is held on a stamper holding part 14. This stamper holding part 14 is constituted of a magnet adapter, magnet chuck and holder. A pipe is installed to the thick plate holder of the holder and hot water is circulated. The stamper 10 is maintained in the constant temp. state in such a manner and the disk substrate 7 is pressed by a pressing device 12 to the stamper 10 device, by which the rugged patterns of the stamper 10 are well transferred.
SASAKI KOJI
WATANABE HIDETOSHI
SUZUKI KOJI
JPH01163025A | 1989-06-27 | |||
JPS63160035A | 1988-07-02 | |||
JPS60174619A | 1985-09-07 |
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