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Title:
TREATING LIQUID FEEDER
Document Type and Number:
Japanese Patent JPH11290792
Kind Code:
A
Abstract:

To easily vent the air out of a nozzle without wastefully discharging treating liquid to prevent trouble due to bubbles on treating liquid feeding.

In a liquid gathering part 14 in a nozzle member 9 in a coating liquid pass communicating with a nozzle port 8, dividing members 21, 22 consisting of air permeable, non-liquid permeable raw material are installed. Since these dividing members 21, 22 are evacuated by a vacuum pump 25, even if bubbles are present in coating liquid 16 reaching the inside of the liquid gathering part 14 from an outer coating liquid tank 17 through a treating liquid feeding line 15, only the bubbles are sucked and taken in the dividing members 21, 22 in the liquid gathering part 14 and the coating liquid from which the bubbles have been removed is discharged to the surface to be coated of a substrate 2 from the nozzle port 8 through a slit part 8a.


Inventors:
OKUNO EIJI
OZAKI KAZUTO
Application Number:
JP1998000100903
Publication Date:
October 26, 1999
Filing Date:
April 13, 1998
Export Citation:
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Assignee:
DAINIPPON SCREEN MFG
International Classes:
G03F7/30; B05C5/00; B05C11/10; B08B3/02; H01L21/304; (IPC1-7): B08B3/02; B05C5/00; G03F7/30; H01L21/304
Attorney, Agent or Firm:
Etsushi Kotani (2 outside)



 
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