Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
TURBO TYPE VACUUM EXHAUSTER
Document Type and Number:
Japanese Patent JP3518343
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To improve to a large extent an exhaust speed without causing the enlargement of a device and the increase of the strength of a member.
SOLUTION: A rotor 1 is formed into a cylindrical shape and a cylindrical insert body 71 is arranged under a condition that it is fitted into the inner circumference of the rotor 1 from an upper side, and also thread grooves 72, 73 are arranged in the inner circumferential surface 5a of a housing 5 surrounding the peripheral surface of the rotor 1 and the peripheral surface 71a of the insert body 71, thereby gas passed through a vacuum intake opening 53 is branched and flows along the inner circumferential surface 1c and peripheral surface 1d of the rotor 1.


Inventors:
Horikawa, Koji
Application Number:
JP17312998A
Publication Date:
April 12, 2004
Filing Date:
June 19, 1998
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SHIMADZU CORP
International Classes:
F04D19/04; (IPC1-7): F04D19/04
Attorney, Agent or Firm:
喜多 俊文 (外1名)