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Title:
ULTRAPURE WATER PRODUCTION APPARATUS
Document Type and Number:
Japanese Patent JP3966501
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To provide an ultrapure water production apparatus which removes traces of fine particles and ionic components contained in ultrapure water supplied to a use point, supplies ultrapure water suitable for the production of a high integration device, or the like, and reduces the replacement frequency of a module.
SOLUTION: In the ultrapure water production apparatus for supplying ultrapure water to the use point through piping, the module filled with a porous organic ion exchanger having an open cell structure having meso-pores 1-1,000 μm in average diameter in macro-pores connected to each other and macro-pore walls and a three-dimensional mesh structure in which ion exchange groups are distributed uniformly, and an ion exchange capacity is at least a 0.5 mg equivalent/g dry porous material is set in the piping for supplying the ultrapure water, and the ultrapure water is further treated by the module.


Inventors:
Koji Yamanaka
Hiroshi Inoue
Application Number:
JP2002073696A
Publication Date:
August 29, 2007
Filing Date:
March 18, 2002
Export Citation:
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Assignee:
Organo Corporation
International Classes:
B01D61/18; C02F1/42; C02F1/32; C02F1/44; C02F1/72; C02F9/00; (IPC1-7): C02F1/42; B01D61/18; C02F1/32; C02F1/44; C02F1/72; C02F9/00
Domestic Patent References:
JP10007835A
JP4078483A
JP2000501175A
JP2003267719A
JP11260787A
JP8089954A
Attorney, Agent or Firm:
Kenji Akatsuka
Yasuo Fukuda