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Patent Searching and Data


Title:
MEASURING DEVICE FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH0611452
Kind Code:
A
Abstract:

PURPOSE: To provide a semiconductor device measuring device which presents measurability for particles as not sensible with a perpendicularly incident beam of light according to the conventional technique.

CONSTITUTION: A silicon board 1 is placed horizontally, and a laser beam source 5 is installed so that a laser beam 3 is put incident to the board 1 at an angle which causes total reflection. The reflected beams of light are received by a photo-reception part 6.


Inventors:
HAGIWARA KENJI
Application Number:
JP16877392A
Publication Date:
January 21, 1994
Filing Date:
June 26, 1992
Export Citation:
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Assignee:
MATSUSHITA ELECTRONICS CORP
International Classes:
G01N21/88; G01N21/956; G06M11/00; H01L21/66; H01S3/00; (IPC1-7): G01N21/88; G06M11/00; H01S3/00
Attorney, Agent or Firm:
Akira Kobiji (2 outside)