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Title:
ULTRASONIC WASHER AND DETECTION OF VIBRATOR DETERIORATION
Document Type and Number:
Japanese Patent JPH10180202
Kind Code:
A
Abstract:

To provide an ultrasonic washer having a function of automatically detecting vibrator deterioration without adjusting the changeover of a switch and a movable contact of variable resistance even when proceeding voltage of high frequency voltage is changed.

An ultrasonic washer is constituted of a device body 11 to which washing liquid is fed, a vibrator 24 fitted to a vibration plate installed in the device body, an ultrasonic oscillator 31 electrically connected to the vibrator 24 for driving the vibrator 24 to generate ultrasonic vibration, an impedance matching circuit 33 installed between the ultrasonic oscillator 31 and the vibrator 24 for matching them, an injected voltage measuring means 44 for measuring voltage injected to the vibrator 24 and voltage reflected from the vibrator 24, a divider part 51 for dividing the voltage injected to the vibrator 24 by the voltage reflected from the vibrator 24, and an indicator part 53 for indicating the division results of the division made in the divider part.


Inventors:
MATSUZAKI NOBUKI
KURIYAMA NOBORU
Application Number:
JP34369596A
Publication Date:
July 07, 1998
Filing Date:
December 24, 1996
Export Citation:
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Assignee:
SHIBAURA ENG WORKS LTD
International Classes:
B08B3/12; B06B1/04; H01L21/304; (IPC1-7): B08B3/12; B06B1/04; H01L21/304
Attorney, Agent or Firm:
Takehiko Suzue (6 outside)



 
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