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Patent Searching and Data


Title:
VACUUM CHAMBER AND METHOD FOR HOLDING VACUUM
Document Type and Number:
Japanese Patent JP2012087923
Kind Code:
A
Abstract:

To solve the problem that opening/closing of a lid has not been considered or it has been conducted using an air cylinder or ball screw which is not a simple means and two planes contacting an O-ring have not been designed so as to be parallel when pressing the O-ring.

The vacuum chamber includes a body 11 and a lid 12 and is sealed with an O-ring 15 located between the body 11 and the lid 12. The lid 12 is connected with the body 11 by an opening/closing means 14 at one end thereof and is equipped with a holder 13 for lifting the lid 12 at the other end thereof. The opening/closing means 14 is designed to ensure a parallel plane between the body 11 and the lid 12 when closing the lid 12 and to press the O-ring 15, holding the parallel plane when the body 11 is vacuumed.


Inventors:
HATANO TETSUO
KIKUCHI KAZUHIRO
Application Number:
JP2010000245640
Publication Date:
May 10, 2012
Filing Date:
October 15, 2010
Export Citation:
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Assignee:
FUKUHARA CO LTD
International Classes:
F16J13/18; F16C11/04; H01L21/205; H01L21/3065
Domestic Patent References:
JP2004200257A2004-07-15
JP2005012174A2005-01-13
JP2009298007A2009-12-24
JPH05213317A1993-08-24
JPH0595102U1993-12-24
JP2003307389A2003-10-31