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Title:
VACUUM DEVICE
Document Type and Number:
Japanese Patent JPH0633230
Kind Code:
A
Abstract:

PURPOSE: To improve the storage efficiency of gaseous molecules in cooling panels by providing a gas straightening plate in a vacuum chamber in order to make the gas in the vacuum chamber uniformly reach the cooling panels in a cryopump in a vacuum device using the cryopump.

CONSTITUTION: The cryopump 1 in which the cooling panels 2 are built is provided on the lower part of the vacuum chamber 3 of a sputtering device to store the gaseous molecules in the vacuum chamber 3 in the cooling panels 2. In the device, the gas straightening plate 4 is fitted in the vicinity of the inlet of the cryopump 1, the flow of the gas to be treated is raised upward and adjusted so as to make the gas uniformly reach the cooling panels 2. By such constitution, the storage efficiency of the gaseous molecules to the cooling panels 2 is improved, thereby making the extent of 80 to 90% of the discharging capacity of the cryopump 1 available.


Inventors:
YAMAMOTO KUNICHI
MURAOKA TATSUO
Application Number:
JP1992000187194
Publication Date:
February 08, 1994
Filing Date:
July 15, 1992
Export Citation:
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Assignee:
FUJITSU LTD
FUJITSU TOHOKU ELECTRON KK
International Classes:
B01J3/00; C23C14/34; C23C14/54; (IPC1-7): C23C14/34; B01J3/00; C23C14/54
Attorney, Agent or Firm:
井桁 貞一



 
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