Title:
VACUUM EVACUATION DEVICE AND OPERATION METHOD THEREOF
Document Type and Number:
Japanese Patent JP2021035158
Kind Code:
A
Abstract:
To provide a vacuum evacuation device which can make circuit components for absorbing regenerative voltage such as brake resistance unnecessary and an operation method thereof.SOLUTION: A vacuum evacuation device concerning one aspect of the present invention is equipped with: a first vacuum pump; a second vacuum pump; and a power supply part. The first vacuum pump comprises: a first pump body having a first motor; and a first drive circuit which drives the first motor. The second vacuum pump comprises: a second pump body having a second motor and connected with a rear stage of the first pump body; and a second drive circuit which drives the second motor. The power supply part comprises a conduction line which can electrically connect between the first drive circuit and the second drive circuit.SELECTED DRAWING: Figure 2
Inventors:
MACHIYA KENJI
SUZUKI TOSHIO
TANAKA TOMONARI
HASHIMOTO KENJI
KIMURA YASUHIRO
SUZUKI TOSHIO
TANAKA TOMONARI
HASHIMOTO KENJI
KIMURA YASUHIRO
Application Number:
JP2019152652A
Publication Date:
March 01, 2021
Filing Date:
August 23, 2019
Export Citation:
Assignee:
ULVAC CORP
International Classes:
H02P3/18; H02P5/46
Domestic Patent References:
| JP2011069294A | 2011-04-07 | |||
| JP2010110139A | 2010-05-13 | |||
| JP2002064901A | 2002-02-28 | |||
| JPH10248281A | 1998-09-14 | |||
| JP2011139620A | 2011-07-14 | |||
| JP2011230040A | 2011-11-17 |
Attorney, Agent or Firm:
Junichi Omori
Mitsuru Takahashi
Teppei Nakamura
Yukinobu Hibino
Mitsuru Takahashi
Teppei Nakamura
Yukinobu Hibino