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Patent Searching and Data


Title:
VACUUM GATE VALVE AND VACUUM TREATMENT DEVICE EQUIPPED WITH THE SAME
Document Type and Number:
Japanese Patent JP2010236650
Kind Code:
A
Abstract:

To provide a vacuum gate valve which is easy to be used and excellent in maintainability and can be manufactured easily and inexpensively, and to provide a vacuum treatment device provided with the vacuum gate valve.

In the vacuum gate valve A which includes a valve box 1 in which a pair of openings 4a, 4b are oppositely formed, and a valve body 5 which is provided within in valve box 1 to open and close either the opening 4a or 4b, the vacuum gate valve is provided with a valve seat 6 which is installed detachably to the opening 4a and a sealing member 7 which is provided on valve seat surface 6a of the valve seat 6 on which the valve body 5 is installed.


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Inventors:
FUKUDA YOSHICHIKA
HAJI YASUHIRO
Application Number:
JP2009000086359
Publication Date:
October 21, 2010
Filing Date:
March 31, 2009
Export Citation:
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Assignee:
SHINMAYWA IND LTD
International Classes:
F16K3/02; F16K3/18; F16K51/02
Domestic Patent References:
JP2007263361A2007-10-11
JP2001324032A2001-11-22
JPS62163665U1987-10-17
JPH0236035U1990-03-08
JPS5782258U1982-05-21
JPS52109223U1977-08-19
JP2004036759A2004-02-05
Attorney, Agent or Firm:
後藤 高志