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Title:
VACUUM HEATING FURNACE
Document Type and Number:
Japanese Patent JP2014081096
Kind Code:
A
Abstract:

To provide a compact vacuum heating furnace capable of performing processing of vacuum drying of moisture content, a solvent and the like included in various samples (materials) by heating the various samples (materials) with low power consumption while a pressure in a chamber is reduced by pressure reducing means such as a vacuum pump.

The vacuum heating furnace is provided which is connected with pressure reducing means, includes a heater inside thereof and heats a sample 1 in a pressure-reduced vacuum. The vacuum heating furnace includes: a chamber CH which is composed of a substantially-cylindrical container-shaped chamber body 11 closed at one end and opened at the other end, and a bottom plate 12 closing an opening portion of the chamber body 11 and houses a sample; a sample support which is disposed inside the chamber body 11 and holds the sample 1; and the heater 14 disposed in the chamber CH and heating the sample 1.


Inventors:
KAWASAKI HIROYUKI
SOFUGAWA TAKUJI
OKUMURA KATSUYA
YAMADA KINJI
NAOI MASAYA
KIMURA YOSHIO
Application Number:
JP2012000227646
Publication Date:
May 08, 2014
Filing Date:
October 15, 2012
Export Citation:
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Assignee:
EBARA CORP
JSR CORP
TOKYO ELECTRON LTD
International Classes:
F27B5/05; F27B5/14; F27D7/06; F27D11/02; H05B3/00
Domestic Patent References:
JPS322878Y1
JPS62213685A1987-09-19
JP2009518617A2009-05-07
JP2008177524A2008-07-31
Attorney, Agent or Firm:
渡邉 勇
小杉 良二
廣澤 哲也



 
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