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Title:
VACUUM PLATING DEVICE
Document Type and Number:
Japanese Patent JPS5816066
Kind Code:
A
Abstract:

PURPOSE: To stabilize the evaporating surface of a crucible and to form a vacuum plating layer uniformly on the surface of a material to be plated by providing a cover consisting of a foamed metallic plate on the evaporating material side of an auxiliary facility for protecting the material to be plated against the heat of the evaporating material.

CONSTITUTION: In a vacuum vessel 1, the vapor of the molten metal in a crucible 5 is vapor deposited by an ion plating method, etc. on a material 2 to be plated. Since a cover 6 is of a foamed material, the heat conduction in the contact part with the surface of a cooled auxiiliary facility 3 is small and therefore the surface temp. thereof rises sharply after the start of the vacuum plating. Then strong adhesive force is generated at the interface between the surface of the cover 6 and the vapor deposition layer accumulated thereof. As a result, the dropping of the materials accumulated on the surface of the cover 6 on the evaporating surface 5a of the crucible 5 is difficult to occur, and the metallic vapor distribution on the evaporation surface 5a can be stabilized for a long time. The deformation over the entire part of the cover 6 is small, and the vacuum plating operation is carried out continuously and stably for a long time.


Inventors:
OONISHI YOUICHI
SUZUKI TAKASHI
OOKUBO KEI
SHIRAISHI TAKESHI
IIJIMA YASUO
Application Number:
JP11473181A
Publication Date:
January 29, 1983
Filing Date:
July 22, 1981
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
C23C14/00; C23C14/24; C23C14/56; (IPC1-7): C23C13/08
Attorney, Agent or Firm:
Toshio Nakao