Title:
真空ポンプ装置
Document Type and Number:
Japanese Patent JP6700003
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum pump device which can exhibit excellent energy efficiency, and can be easily manufactured, and which can achieve high rotation speed and miniaturization.SOLUTION: A vacuum pump device evacuates gas by rotating a pump rotor. The vacuum pump device includes a main shaft for outputting rotational power to the pump rotor, a motor rotor attached to the main shaft, and a motor stater confronting the motor rotor in an axial direction of the main shaft. The motor stater includes a stator core 232 formed by laminating amorphous metal in a radial direction and arranged concentrically with the motor rotor, and a stator coil wound around the stator core. A groove 234 having a parallel width with a straight line perpendicular to an axis as a center is formed at equal intervals along a circumferential direction on a surface of the stator core confronting the motor rotor, and the stator coil is arranged in the groove.SELECTED DRAWING: Figure 4
Inventors:
Yoshinori Kojima
Shinya Yoshida
Toshimitsu Ibarata
Takuji Sofukawa
Shinya Yoshida
Toshimitsu Ibarata
Takuji Sofukawa
Application Number:
JP2015147865A
Publication Date:
May 27, 2020
Filing Date:
July 27, 2015
Export Citation:
Assignee:
Ebara Corporation
International Classes:
F04C29/00; F04B39/00; F04C18/18; F04C25/02; H02K1/02; H02K1/16; H02K7/14; H02K16/02
Domestic Patent References:
| JP2010270656A | ||||
| JP2013155649A | ||||
| JP201550798A | ||||
| JP2006187091A | ||||
| JP2014117030A | ||||
| JP201442368A | ||||
| JP2013208013A | ||||
| JP201250312A |
Foreign References:
| US4578610 |
Attorney, Agent or Firm:
Shinjiro Ono
Toru Miyamae
Yukio Kanegae
Makoto Watanabe
Tobata Obata
Toru Miyamae
Yukio Kanegae
Makoto Watanabe
Tobata Obata