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Title:
VACUUM PUMP AND MOTOR CONTROLLER
Document Type and Number:
Japanese Patent JP2019047680
Kind Code:
A
Abstract:
To provide a vacuum pump which safety shifts to a circumvention mode while avoiding an over voltage, and a motor controller.SOLUTION: A turbo molecular pump 1 comprises: a power supply unit 4 that converts an AC power obtained from an AC power supply to a DC power and outputs it; and a motor controller 10 that controls a motor 3. The motor controller 10 comprises: a motor driving circuit 11 to which the DC power or a regenerative power is supplied and which drives the motor 3; a backflow prevention diode 12 that is provided between the power supply unit 4 and the motor driving circuit 11; a power failure detection circuit 14 that detects a primary side voltage of the backflow prevention diode 12; a driving voltage detection circuit 15 that detects a secondary side voltage of the backflow prevention diode 12; and a motor control circuit 16 that determines whether it is a primary side power failure that is a power failure of the AC power or a secondary side power failure that is the power failure of the DC power on the basis of the primary side voltage and the secondary side voltage when the primary side voltage is dropped to a predetermined power failure detection threshold value, and controls the motor driving circuit 11 so as to shift to a regenerative mode.SELECTED DRAWING: Figure 1

Inventors:
SATO HIKARI
Application Number:
JP2017170489A
Publication Date:
March 22, 2019
Filing Date:
September 05, 2017
Export Citation:
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Assignee:
EDWARDS KK
International Classes:
H02P3/18; F04D19/04; H02P29/028
Attorney, Agent or Firm:
Takamitsu Shimizu



 
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