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Title:
VACUUM TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP3440108
Kind Code:
B2
Abstract:

PURPOSE: To provide a vacuum treatment apparatus which is a vacuum treatment apparatus for surface treatment of substrates or materials and is capable of simplifying the structure of the apparatus and enhancing the cost effectiveness thereof.
CONSTITUTION: This vacuum treatment apparatus is provided with the vacuum treatment apparatus 31 for the surface treatment of the substrates or materials and/or at least one seal 51a, 51b, 56a, 56b, 58c, 58d, 55b, 55c, or the like, which may be operated or driven by air pressure or liquid pressure for the purpose of sealing portion thereof.


Inventors:
Gregor Strasse
Pius gout
Jörg Steinmann
Roman shelter
Application Number:
JP2448993A
Publication Date:
August 25, 2003
Filing Date:
February 12, 1993
Export Citation:
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Assignee:
Unaxis Balzers Akchen Gesell Shaft
International Classes:
B01J3/00; B01J3/02; B01J19/00; C09K3/10; C23C14/56; H01L21/00; H01L21/677; (IPC1-7): B01J3/00; B01J3/02; B01J19/00; C09K3/10; C23C14/56; H01L21/68
Domestic Patent References:
JP58164236A
JP59116372A
JP6360276A
JP6312550A
JP6386867A
JP63119667U
JP4855247U
JP48111790U
JP433251U
Other References:
【文献】米国特許3711062(US,A)
【文献】米国特許2227983(US,A)
Attorney, Agent or Firm:
Shoichi Ui (4 others)