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Title:
VACUUM VALVE
Document Type and Number:
Japanese Patent JP2018102059
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum valve capable of preventing a voltage rise in a DC power supply line during a deceleration operation.SOLUTION: A vacuum valve comprises: a valve; a motor 31 for driving a valve plate; switching circuits 451A and 451B that turn on/off application of a DC voltage to wirings 312A and 312B of the motor 31; and a switching element SW0 that is provided in parallel with the switching circuits 451A and 451B on an input line of a DC voltage inputted to the switching circuits 451A and 451B, and can pass and shut down a current. The switching element SW0 is brought into a powered state in synchronization with an on-timing of the switching circuits 451A and 451B during a deceleration driving of the motor 31.SELECTED DRAWING: Figure 3

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Inventors:
NAKAMURA MASAYA
HIRATA NOBUYUKI
OZAKI JUNICHIRO
Application Number:
JP2016246858A
Publication Date:
June 28, 2018
Filing Date:
December 20, 2016
Export Citation:
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Assignee:
SHIMADZU CORP
International Classes:
H02P3/22; F16K31/04; F16K51/02; H02P25/06
Domestic Patent References:
JP2012196143A2012-10-11
JP2016121751A2016-07-07
JPH11128587A1999-05-18
JPH11275889A1999-10-08
JP2006320134A2006-11-24
JP2005525202A2005-08-25
JPH0412686A1992-01-17
JP2016037992A2016-03-22
JPH0398482A1991-04-24
Foreign References:
US20140001987A12014-01-02
Attorney, Agent or Firm:
Fuyuki Nagai



 
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