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Patent Searching and Data


Title:
VACUUM VAPOR DEPOSITION DEVICE
Document Type and Number:
Japanese Patent JPH083743
Kind Code:
A
Abstract:

PURPOSE: To form uniform thin films of a material to be deposited by evaporation, by preventing deterioration of a material to be deposited with heat and preventing generation of the unevenness of the thin films formed of the material to be deposited by evaporation.

CONSTITUTION: A film 16 is wound around a cooling roller 18 via a first expander roller 28 arranged adjacently to the cooling roller 18. A second expander roller 30 which makes a pair with the expander roller 28 and has the shape similar to the shape of the roller 28 is arranged adjacently to the cooling roller 18 in an un-winding direction of the cooling roller 18. The film 16 is loaded with the extension force in a transverse direction by a pair of such expander rollers 28, 30 and is so wound around the cooling roller 18 as to come into tight contact therewith. The ratio of the winding length of the film 16 on the cooling roller 18 to the thickness of the film 16 is set at 60×103 to 200×103.


Inventors:
OZAKI KUNIHIKO
MACHIDA TOSHINORI
Application Number:
JP13343194A
Publication Date:
January 09, 1996
Filing Date:
June 15, 1994
Export Citation:
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Assignee:
TOYO INK MFG CO
International Classes:
C23C14/20; C23C14/56; (IPC1-7): C23C14/56; C23C14/20
Attorney, Agent or Firm:
Atsushi Nakajima (3 outside)