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Title:
VALVE CARD, SUBSTRATE TREATING DEVICE AND TREATING RANGE
Document Type and Number:
Japanese Patent JP2009150044
Kind Code:
A
Abstract:

To provide a new valve card for a substrate treating device designed to controllably eject a treating fluid to the substrate.

The substrate treating device can operate between an open position and a close position, includes a combination of a plurality of selectively operable valves 1-17 whose at least a part fluid-communicating with corresponding special-purpose fluid ejecting jets, a power input port designed to receive a power cable for supplying power to a valve card 360, a command data input port designed to receive a valve control cable for transmitting valve operation command from a control unit to a valve card 360, an integrated circuit board designed to convert command from the data input port to the command for actuating the power-supplied valve so as to selectively open or shut the valve. The valve card 360 is suitable for independently operating in the substrate treating device and can be detached from the substrate treating device as an integrated structure.


Inventors:
KANG PETER K
MCBRIDE DANIEL T
KOHLMAN RANDY S
STEWART WILLIAM H
Application Number:
JP2009000037242
Publication Date:
July 09, 2009
Filing Date:
February 19, 2009
Export Citation:
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Assignee:
MILLIKEN & CO
International Classes:
D06B11/00; B32B3/10; D05C17/02; D06B1/00; D06B1/02; D06Q1/06; D06P
Domestic Patent References:
JPH0723844A1995-01-27
JP2000263673A2000-09-26
Foreign References:
US4578965A1986-04-01
US20020034607A12002-03-21
EP0306568A11989-03-15
Attorney, Agent or Firm:
鈴江 武彦
蔵田 昌俊
河野 哲
中村 誠
福原 淑弘
峰 隆司
白根 俊郎
村松 貞男
野河 信久
幸長 保次郎
河野 直樹
砂川 克
風間 鉄也
勝村 紘
河井 将次
佐藤 立志
岡田 貴志
堀内 美保子
竹内 将訓
市原 卓三
山下 元