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Title:
VALVE, AND SUBSTRATE PROCESSING DEVICE HAVING THE SAME
Document Type and Number:
Japanese Patent JP2011208786
Kind Code:
A
Abstract:

To provide a valve capable of controlling discharge of particles.

The valve 11 includes an inlet port 15, an outlet port 16, and a discharge port 17. The outlet port 16 is connected to the inlet port 15 by first conduits 18, 20. The discharge port 17 is connected to the first conduits 18, 20 by a second conduit 19. The second conduit 19 is connected to the first conduits 18, 20 at a connection position CP1 set between the inlet port 15 and the outlet port 16. The second conduit 19 is opened/closed by movement of the first actuator 24 by a first valve element 25. A restriction part 37 is disposed to the first conduits 18, 20 on a side closer to the outlet port 16 than the connection position CP1. The restriction part 37 has a conduit area smaller than conduit areas of the discharge port 17 and the second conduit 19.


Inventors:
YOSHIDA TAKESHI
Application Number:
JP2010079528A
Publication Date:
October 20, 2011
Filing Date:
March 30, 2010
Export Citation:
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Assignee:
DAINIPPON SCREEN MFG
International Classes:
F16K11/22; F16K7/12; F16K27/00; F16K51/00; H01L21/304
Domestic Patent References:
JP2008169963A2008-07-24
JP2003021248A2003-01-24
JP2009152291A2009-07-09
JP2009272548A2009-11-19
JP2004247509A2004-09-02
JPH11128777A1999-05-18
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki