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Patent Searching and Data


Title:
VERTICAL HEAT TREATMENT DEVICE AND CONTROL METHOD FOR THE SAME
Document Type and Number:
Japanese Patent JP2010249507
Kind Code:
A
Abstract:

To shorten TAT and to improve throughput by shortening a converging time in a temperature rise recovery in a low temperature region.

A control device for performing temperature control to set the inside of a treatment container from an initial temperature to a target temperature higher than the initial temperature and within a range of 100-500°C, carries out processes of: preparing a control amount for controlling power supply to a heater and a blower with one control amount to increase power supply to the heater by increasing an absolute value in a positive direction and to increase power supply to the blower by increasing an absolute value in a negative direction; heating the inside of the treatment container to a predetermined temperature under the target temperature by stopping power supply to the blower according to the control amount and supplying power to the heater with a predetermined supply amount; converging the inside of the treatment container to the target temperature by supplying power to the blower with a predetermined supply amount to blow cooling air according to the control amount while stopping power supply to the heater from a point of time of reaching the predetermined temperature; and maintaining the inside of the treatment container to the target temperature by stopping power supply to the blower according to the control amount while supplying power to the heater with a value smaller than the predetermined supply amount.


Inventors:
NAKAJIMA MAKOTO
SAITO TAKANORI
TAKIZAWA TAKESHI
HONMA MANABU
Application Number:
JP2010000136939
Publication Date:
November 04, 2010
Filing Date:
June 16, 2010
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
F27B17/00; F27B5/14; F27B5/16; F27D7/06; F27D11/02; F27D19/00; F27D21/00; H01L21/31
Domestic Patent References:
JPH0379985A1991-04-04
JP2005188869A2005-07-14
JPH05121344A1993-05-18
JPH09186097A1997-07-15
Foreign References:
WO2005064254A12005-07-14
Attorney, Agent or Firm:
絹谷 信雄
金坂 憲幸