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Title:
縦型熱処理装置及びその制御方法
Document Type and Number:
Japanese Patent JP5613471
Kind Code:
B2
Inventors:
中島 誠
斉藤 孝規
滝澤 剛
本間 学
Application Number:
JP2010136939A
Publication Date:
October 22, 2014
Filing Date:
June 16, 2010
Export Citation:
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Assignee:
東京エレクトロン株式会社
International Classes:
F27B17/00; F27B5/14; F27B5/16; F27D7/06; F27D11/02; F27D19/00; F27D21/00; H01L21/31
Attorney, Agent or Firm:
Nobuo Kinutani
Noriyuki Kanesaka



 
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