Title:
VIBRATION BREAKER CONTAINING MICROLITHOGRAPHY FOR SUBMICRON DESIGNING RULE
Document Type and Number:
Japanese Patent JPS6224626
Kind Code:
A
Inventors:
HAAMAN PIITAA SHIYATEN
AANORUDO WAISU
AANORUDO WAISU
Application Number:
JP11342686A
Publication Date:
February 02, 1987
Filing Date:
May 17, 1986
Export Citation:
Assignee:
EATON CORP
International Classes:
H01L21/30; G03F7/20; G05D19/02; H01L21/027; (IPC1-7): G03F7/20; H01L21/30
Attorney, Agent or Firm:
Kaname Yumi