Title:
VISUAL INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP3657028
Kind Code:
B2
Abstract:
PURPOSE: To provide a visual inspection device for correcting the fluctuation of the quantity of illumination light and the change of the reflection factor of a target to be inspected and for stably detecting a defect.
CONSTITUTION: The average brightness of a normal electronic component detected from the picked-up image of the normal electronic component without any defect in advance and that of a component to be inspected being detected from the picked-up image of the component to be inspected are obtained from the image picked-up by a camera 6 by an average brightness calculating equipment 14 and a threshold for detecting a defect is corrected by both average brightnesses. When the above quantity of light and the reflection factor change between the case when the average brightness of the normal electronic component is detected and the case when the average brightness of the part to be inspected is detected, both average brightnesses differ and the threshold is corrected by a correction threshold calculation equipment 17 from the difference.
Inventors:
Fujii Seiki
Shinichi Yanabe
Fujimoto Masatoshi
Yuichiro Goto
Eiji Takahashi
Yoshiro Nishimoto
Yamaguchi certificate
Shinichi Yanabe
Fujimoto Masatoshi
Yuichiro Goto
Eiji Takahashi
Yoshiro Nishimoto
Yamaguchi certificate
Application Number:
JP16346395A
Publication Date:
June 08, 2005
Filing Date:
June 29, 1995
Export Citation:
Assignee:
Genesis Technology Co., Ltd.
International Classes:
G01N21/88; G01N21/93; G01N21/956; G01B11/24; G06T1/00; G06T7/00; H01L21/66; H01L23/50; (IPC1-7): G01B11/24; G01N21/956
Domestic Patent References:
| JP6076047A | ||||
| JP2133883A | ||||
| JP7113758A |
Attorney, Agent or Firm:
Takeo Honjo