Title:
VOLTAGE ACTUATOR
Document Type and Number:
Japanese Patent JP2586371
Kind Code:
B2
Abstract:
PURPOSE: To make it possible to measure displacement not only in a piezo-electric active part but also other parts and accurately measure the whole amount of displacement as well with regards to fluctuations in temperature or force in case when the amount of a lamination type piezo-electric actuator is measured with a strain gauge.
CONSTITUTION: Strain gauges 8a, 8b and 8c are mounted on protection layers 3a and 3b of a laminated body 1B and an active part 2, which makes it possible to measure the amount of displacement which combines the protection layers 3a and 3b and the active part 3. It is, therefore, possible to indicate the amount of displacement of the laminated body 1B with accuracy even if there exists a differential strain caused by temperature or stress between both of them. Similar efficiency can be expected from an actuator to which a metal-made temperature compensation member is mounted, for example, where the Young's modulus of the compensation member is different from that of the laminated body 1B.
Inventors:
OOYA KAZUMASA
HAMADA KYOTAKA
INOI TAKAYUKI
HAMADA KYOTAKA
INOI TAKAYUKI
Application Number:
JP34177692A
Publication Date:
February 26, 1997
Filing Date:
December 22, 1992
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
G05D3/00; H01L21/027; H01L21/30; H01L41/04; H01L41/083; H02N2/00; (IPC1-7): H01L41/083; G05D3/00; H02N2/00
Domestic Patent References:
| JP6467985A | ||||
| JP6436091A | ||||
| JP63283180A | ||||
| JP61272984A | ||||
| JP6122374U |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)