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Patent Searching and Data


Title:
WAFER CARRYING DEVICE
Document Type and Number:
Japanese Patent JPH10335431
Kind Code:
A
Abstract:

To detect the presence/absence of wafers at a specific position in a front open cassette and the accurate positions of the wafers by using a method in which a specific pattern or the shape of a light source is projected upon the crosssectional front end sections of the wafers.

A wafer carrying device is constituted of a Koehler illumination system 1 which illuminates a specific pattern, a projection lens 3 which projects the specific pattern upon the cross-sectional front end sections of wafers 8, 9, and 10 in a front open cassette 6 along its optical axis which is nearly parallel with the wafers 8, 9, and 10, another projection lens 12 which projects the image of the projected pattern, and mechanism sections 14 and 15 which change the position of the image of the projected pattern to the wafers 8, 9, and 10. The presence/absence of the wafers 8, 9, and 10 at a specific position in the cassette 6 and the accurate positions of the wafers 8, 9, and 10 are detected from the detecting position of the image of the specific pattern projected upon the cross-sectional front end sections of the wafers 8, 9, and 10. Therefore, the safety is improved, because no parallel rays of light are required as a light source.


Inventors:
NAKAHARA TAKASHI
SATO TERUYA
Application Number:
JP1997000153076
Publication Date:
December 18, 1998
Filing Date:
May 28, 1997
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/67; H01L21/68; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
伊東 哲也 (外2名)