Title:
WAFER CASSETTE TRANSPORTATION SYSTEM
Document Type and Number:
Japanese Patent JP3795134
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a wafer cassette transportation system which can reduce communication quantity between a transportation device and a controller without raising the cost of the whole device and which can shorten the moving time of the transportation device.
SOLUTION: The controller 15 outputs a production lot carry-in command signals when it receives a lot carry-in request signal outputted from a first processor 11 and an idle cassette carry-out request signal outputted from a second processor 12. The transportation device 20 receives the lot carry-in command signal, transports the real cassette of the first processor 11 to the second processor 12 and transports the idle cassette of the second processor 12 to an empty cassette storage place 14.
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Inventors:
Teruo Isogai
Application Number:
JP10963896A
Publication Date:
July 12, 2006
Filing Date:
April 30, 1996
Export Citation:
Assignee:
UMC Japan Co., Ltd.
International Classes:
B65D85/38; H01L21/677; B65G49/07; H01L21/00; H01L21/673; (IPC1-7): H01L21/68; //B65D85/38
Domestic Patent References:
JP837219A | ||||
JP6267919A | ||||
JP982773A |
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe
Shigeo Naruse
Takashi Watanabe
Shigeo Naruse
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