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Patent Searching and Data


Title:
WIRE SAW DEVICE
Document Type and Number:
Japanese Patent JP2017196689
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a wire saw device capable of preventing a damage in a transparent part for inspecting the inside of a processing chamber visually.SOLUTION: A wire saw device comprises: a processing chamber 10 for processing a work-piece; a cover 20 for covering said processing chamber 10; and a transparent part 21 formed in at least a portion of said cover 20. The wire saw device has a cleaning unit 40 arranged to face the upper portion of the internal surface 20a of the cover 20. The cleaning unit 40 comprises: a washing liquid channel 41 extending along the transverse direction of the transparent part 21; a washing liquid outflow port 42 disposed in the washing liquid channel 41; a washing liquid receiving groove 43 opened upward below the washing liquid outflow port 42 extending along the transverse direction of the transparent part 21; and a washing liquid guide part 44 extending along the opening edge 43a of the washing liquid receiving groove 43 and extending obliquely downward to the cover 20.SELECTED DRAWING: Figure 5

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Inventors:
ABE SHINPEI
Application Number:
JP2016088232A
Publication Date:
November 02, 2017
Filing Date:
April 26, 2016
Export Citation:
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Assignee:
TOYOTA MOTOR CORP
International Classes:
B24B27/06; B23Q11/00; B28D1/02; B28D5/04; B28D7/02; H01L21/304
Attorney, Agent or Firm:
平木 祐輔
関谷 三男
石川 滝治