Title:
WORK DRYING APPARATUS
Document Type and Number:
Japanese Patent JP2003075066
Kind Code:
A
Abstract:
To prevent rusting on a contact portion of a work with another member.
A work drying apparatus includes a Belnuri chuck 1 for drying a work 2 while holding it in a non-contact manner by spraying clean gas 3 in the state thereof suitable for drying on the work after washed.
Inventors:
TOKIDA HARUHIRO
NAKAMURA MASAKI
NAKAMURA MASAKI
Application Number:
JP2001269436A
Publication Date:
March 12, 2003
Filing Date:
September 05, 2001
Export Citation:
Assignee:
SANKYO SEIKI SEISAKUSHO KK
International Classes:
F26B21/00; F26B5/14; F26B9/06; (IPC1-7): F26B21/00; F26B5/14; F26B9/06
Attorney, Agent or Firm:
Murase Kazumi