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Title:
X-RAY ANALYZER
Document Type and Number:
Japanese Patent JP3968452
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To obtain an X-ray analyzer by which the intensity distribution of the wavelength of X-rays is measured in a short time and with a small time difference.
SOLUTION: By using a plurality of crystal planes which are provided at one dispersive crystal, X-rays are spectrally diffracted into a plurality of different wavelengths. In addition, by using a two-dimensional detector, the X-rays at a plurality of spectrally diffracted different wavelengths are distinguished and detected. As a first mode, in an X-ray analyzer in which a spectrscope is irradiated with X-rays and in which an X-ray analysis is performed by the X-rays, at a specific wavelength, which are spectrally diffracted by the spectrscope, the spectroscope uses a plurality of crystal planes whose lattice spacing and orientation are provided in one crystal at a dispersive crystal 1 provided at the spectroscope are different, and the X-rays are spectrally diffracted simultaneously into a plurality of different wavelengths by a plurality of crystal planes at the dispersive crystal 1. As a second mode, an X-ray analyzer is constituted in such a way that a spectroscope provided with a plurality of crystal planes whose lattice spacing and orientation are different in one crystal is provided and that a two-dimensional detector 20 which detects the intensity and the incident position of X-rays is provided. The X-rays are spectrally diffracted simultaneously into a plurality of different wavelengths by using the plurality of crystal planes, and a plurality of spectrally diffracted X-rays are detected simultaneously by the two-dimensional detector 20.


Inventors:
Honda Kazumasa
Yuujima Kojima
Hiroo Hideo
Shigeki Hayashi
Application Number:
JP23585798A
Publication Date:
August 29, 2007
Filing Date:
August 21, 1998
Export Citation:
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Assignee:
National Institute of Advanced Industrial Science and Technology
Honda Kazumasa
Yuujima Kojima
International Classes:
G01N23/22; G21K1/06; (IPC1-7): G01N23/22; G21K1/06
Domestic Patent References:
JP795045B2
JP4204297A
JP6361941A
JP2543460Y2
JP2636982B2
JP9166488A
JP11304729A
JP599864A
JP1151883A
JP5215698A
Attorney, Agent or Firm:
Matsuji Takemoto
Akio Shionoiri