Title:
【発明の名称】プローブ及びこのプローブを用いたプローブカード
Document Type and Number:
Japanese Patent JP3094007
Kind Code:
B2
Inventors:
Masao Ohkubo
Teruaki Fujinaga
Junya Tanaka
Akihito Kurachi
Junichi Tabata
Teruaki Fujinaga
Junya Tanaka
Akihito Kurachi
Junichi Tabata
Application Number:
JP17057498A
Publication Date:
October 03, 2000
Filing Date:
June 02, 1998
Export Citation:
Assignee:
Nippon Electronic Materials Co., Ltd.
International Classes:
G01R1/067; G01R1/073; H01L21/66; (IPC1-7): G01R1/067; G01R1/073; H01L21/66
Domestic Patent References:
| JP9304435A | ||||
| JP9184852A | ||||
| JP658371U | ||||
| JP58114775U |
Attorney, Agent or Firm:
Koji Onishi (1 outside)