Title:
チップ製造装置およびチップの製造方法
Document Type and Number:
Japanese Patent JP5892740
Kind Code:
B2
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Inventors:
Kazuhiro Moriyama
Application Number:
JP2011162433A
Publication Date:
March 23, 2016
Filing Date:
July 25, 2011
Export Citation:
Assignee:
MORISHO CORPORATION
International Classes:
B27L11/00; B02C18/14; B02C18/18; B02C18/22
Domestic Patent References:
| JP2004267944A | ||||
| JP55029229U | ||||
| JP11156814A | ||||
| JP2007050409A |
Foreign References:
| US4156508 |
Attorney, Agent or Firm:
Shuichiro Ariyoshi
Katsuhiko Kajiwara
Katsuhiko Kajiwara