Title:
連続蒸留式トリクロロシラン気化供給装置および連続蒸留式トリクロロシランガス気化方法
Document Type and Number:
Japanese Patent JP6503293
Kind Code:
B2
Abstract:
A continuous distillation-type trichlorosilane vaporization supply apparatus includes an evaporator including an introduction port for hydrogen gas as a carrier gas and having a heater that vaporizes liquid trichlorosilane; and a condenser including a cooling device to condense liquid at a temperature corresponding to a saturated vapor pressure, which is lower than a vapor pressure of the vaporized trichlorosilane gas, wherein a center line of the evaporator and a center line of the condenser are not on the same line, and a lower end of the condenser has a structure that communicates with a lower end of the evaporator through a pipe.
Inventors:
Shinji Marutani
Application Number:
JP2015528285A
Publication Date:
April 17, 2019
Filing Date:
July 22, 2014
Export Citation:
Assignee:
Techno Bandarie Co., Ltd.
International Classes:
H01L21/205; C23C16/448; C30B29/06
Domestic Patent References:
| JP11278987A | ||||
| JP2000319095A | ||||
| JP8047629A | ||||
| JP1283817A |
Foreign References:
| WO2010116448A1 | ||||
| WO2013024310A1 |
Attorney, Agent or Firm:
Shirasaka Patent Office
Shirasaka Hajime
Shirasaka Hajime