Title:
基板の搬送装置
Document Type and Number:
Japanese Patent JP4512441
Kind Code:
B2
Inventors:
Naruyuki Nagura
Adachi Makoto
Fumio Higuchi
Adachi Makoto
Fumio Higuchi
Application Number:
JP2004223591A
Publication Date:
July 28, 2010
Filing Date:
July 30, 2004
Export Citation:
Assignee:
Nippon Design Industry Co., Ltd.
International Classes:
B65G49/06; B65G13/00; B65G39/10; B65H5/06; H01L21/677; H05F3/02
Domestic Patent References:
| JP4116055A | ||||
| JP10181839A | ||||
| JP2001341881A | ||||
| JP5257403A |
Attorney, Agent or Firm:
Keisuke Matsuyama
Satoshi Takaya
Tsuyoshi Makino
Satoshi Takaya
Tsuyoshi Makino