Title:
基板搬送装置および基板搬送装置のコロ配置の決定方法
Document Type and Number:
Japanese Patent JP5145815
Kind Code:
B2
Inventors:
Seiya Yasuo
Hiroshi Nagai
Yasuki Shimizu
Hiroshi Nagai
Yasuki Shimizu
Application Number:
JP2007206194A
Publication Date:
February 20, 2013
Filing Date:
August 08, 2007
Export Citation:
Assignee:
TORAY INDUSTRIES,INC.
International Classes:
B65G39/04; B65G13/04
Domestic Patent References:
| JP2005272061A | ||||
| JP2002145426A | ||||
| JP8268519A |