Title:
成膜装置およびデータ作成方法
Document Type and Number:
Japanese Patent JP6600519
Kind Code:
B2
Abstract:
The invention provides a film forming device and a data making device, and the device can high precisely and stably executes a film forming processing technology of an expected film color. In a film forming device, a determination portion determines a film forming conditions based on color information input from an input portion and referred by corresponding data. In addition, the film forming conditions at least comprise gas supply quantity as a film color adjustment factor. In general, the kind or the supply quantity of gas supplied in film forming processing are main film color adjustment factors. Then, compared with an execution method for adjusting film forming conditions according to the intuition or experience fo an operator of the film forming device, the method provided by the invention can high-precisely and stably excecute the film forming processing of the expexted film colorl.
More Like This:
| WO/2000/060657 | ENDPOINT DETECTION IN THE FABRICATION OF ELECTRONIC DEVICES |
| JPH0693436 | SPUTTERING METHOD |
| JP2006097069 | VACUUM FILM-FORMING APPARATUS |
Inventors:
Atsushi Osawa
Application Number:
JP2015190106A
Publication Date:
October 30, 2019
Filing Date:
September 28, 2015
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
C23C14/54; G02B1/10
Domestic Patent References:
| JP7072307A | ||||
| JP2006071402A | ||||
| JP2003202404A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita