Title:
静圧気体軸受
Document Type and Number:
Japanese Patent JP4929915
Kind Code:
B2
Inventors:
Hideo Ozawa
Application Number:
JP2006221335A
Publication Date:
May 09, 2012
Filing Date:
August 14, 2006
Export Citation:
Assignee:
OILES CORPORATION
International Classes:
F16C32/06; B65G13/00; B65G49/06; F16C13/02; H01L21/677
Domestic Patent References:
| JP2004226983A | ||||
| JP5296245A | ||||
| JP2005264963A | ||||
| JP56131825A |
Attorney, Agent or Firm:
Takeshi Takada