Title:
ガス処理装置および放熱方法
Document Type and Number:
Japanese Patent JPWO2005024928
Kind Code:
A
Inventors:
Akira Amuro
Koichiro Kimura
Kyoko Ikeda
Tomoyuki Sakota
Iizuka Eight castles
Koichiro Kimura
Kyoko Ikeda
Tomoyuki Sakota
Iizuka Eight castles
Application Number:
JP2004012466W
Publication Date:
March 17, 2005
Filing Date:
August 30, 2004
Export Citation:
Assignee:
Tokyo Electron, Ltd.
International Classes:
H01L21/31; C23C16/455
Attorney, Agent or Firm:
Hiroshi Takayama