Title:
角型基板研磨用ガイドリング及び研磨ヘッド並びに角型基板の研磨方法
Document Type and Number:
Japanese Patent JP4616062
Kind Code:
B2
Inventors:
Tsuneo Numanami
Masayuki Nakatsu
Masayuki Nakatsu
Application Number:
JP2005121087A
Publication Date:
January 19, 2011
Filing Date:
April 19, 2005
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
B24B37/04; B24B7/24; B24B37/30; B24B37/32
Domestic Patent References:
| JP2003048148A | ||||
| JP64034661A | ||||
| JP6009859U | ||||
| JP8187657A | ||||
| JP2000094308A | ||||
| JP2051057U |
Attorney, Agent or Firm:
Mikio Yoshimiya